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Seminar on Mathematics for various disciplines
Seminar information archive ～04/22｜Next seminar｜Future seminars 04/23～
| Date, time & place | Tuesday 10:30 - 11:30 056Room #056 (Graduate School of Math. Sci. Bldg.) |
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2009/06/03
10:30-11:30 Room #056 (Graduate School of Math. Sci. Bldg.)
須藤孝一 (大阪大学)
Evolution of microstructures on crystal surfaces by surface diffusion
須藤孝一 (大阪大学)
Evolution of microstructures on crystal surfaces by surface diffusion
[ Abstract ]
We have studied the shape evolution of microstructures fabricated on silicon surfaces by surface diffusion during annealing. Various interesting phenomena, such as corner rounding, facet growth, and void formation, have been experimentally observed. We discuss these observations both from macroscopic and mesoscopic viewpoints. The evolution of macroscopic surface profiles is discussed using evolution equations based on the continuum surface picture. We analyze the mesoscopic scale aspects of the shape evolution using a step-flow model.
We have studied the shape evolution of microstructures fabricated on silicon surfaces by surface diffusion during annealing. Various interesting phenomena, such as corner rounding, facet growth, and void formation, have been experimentally observed. We discuss these observations both from macroscopic and mesoscopic viewpoints. The evolution of macroscopic surface profiles is discussed using evolution equations based on the continuum surface picture. We analyze the mesoscopic scale aspects of the shape evolution using a step-flow model.
